Horiba STEC SEC-Z500X Series Digital MFC Controller SEC-Z512MGX 50CCM NF3

$149.99 Buy It Now or Best Offer
free,30-Day Returns

Seller Store semiconductorpartsdepot
(91) 100.0%,

Location: Hillsboro, Oregon
Ships to: US,
Item: 145773498618

Return shipping will be paid by:Buyer
All returns accepted:Returns Accepted
Item must be returned within:30 Days
Refund will be given as:Money Back
Return policy details:
Horiba:Horiba
Component Type:MFC
MPN:SEC-Z512MGX
Country/Region of Manufacture:Japan
Unit Quantity:1

This is a used Horiba Z500 MFC controller that is fully operational and in good working order. It came of a dry etcher that was getting process gas upgrades for new etching process recipes. This MFC has been purged with argon (Ar) gas prior to removal of tool to ensure safety and handling. If there are any problems with this unit, please don’t hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. SEC-Z500X SeriesMulti Range/Multi Gas Digital Mass Flow ControllerThis is HORIBA’s best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily. With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.High Accuracy ±1.0% S.P.This mass flow controller’s linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC’s standard gas measurement system. High Speed ResponseInstalled with the «Variable PID system», which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed. Multi-Gas/Multi-Range SolutionThe configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and costs. The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing.

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